Patents/Inventors

Akitsugu Ueda

KyotoJP7 patents

6 Patents

US123410312025
Light Irradiation Type Heat Treatment Method and Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US122834982025
Light Irradiation Type Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US119012002024
Light Irradiation Type Heat Treatment Method and Heat Treatment Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US117988232023
Light Irradiation Type Thermal Process Apparatus Using a Gas Ring
SCREEN Holdings Co., Ltd.
0 cites
US116211782023
Light Irradiation Type Heat Treatment Apparatus Including Oxygen Analyzer and Heat Treatment Method Thereof
SCREEN HOLDINGS CO., Ltd.
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US115748242023
Heat Treatment Method Including Low Temperature Degassing Before Flash Lamp Anneal and Heat Treatment Apparatus Thereof
SCREEN HOLDINGS CO., Ltd.
0 cites