Patents/Inventors

Akiteru Ko

Albany, NYUS10 patents

10 Patents

US125851852026
Acid for Reactive Development of Metal Oxide Resists
Tokyo Electron Limited
0 cites
US123325682025
Metal Oxide Resists for EUV Patterning and Methods for Developing the Same
TOKYO ELECTRON LIMITED
0 cites
US122875782025
Cyclic Method for Reactive Development of Photoresists
TOKYO ELECTRON LIMITED
0 cites
US122725592025
Oblique Deposition and Etch Processes
TOKYO ELECTRON LIMITED
0 cites
US116768172023
Method for Pitch Split Patterning Using Sidewall Image Transfer
Tokyo Electron Limited
0 cites
US116519652023
Method and System for Capping of Cores for Self-aligned Multiple Patterning
Tokyo Electron Limited
0 cites
US116262712023
Surface Fluorination Remediation for Aluminium Oxide Electrostatic Chucks
Tokyo Electron Limited
0 cites
US116159582023
Methods to Reduce Microbridge Defects in EUV Patterning for Microelectronic Workpieces
Tokyo Electron Limited
0 cites
US115574792023
Methods for EUV Inverse Patterning in Processing of Microelectronic Workpieces
TOKYO ELECTRON LIMITED
0 cites
US115519302023
Methods to Reshape Spacer Profiles in Self-aligned Multiple Patterning
Tokyo Electron Limited
0 cites