Patents/Inventors

Akira Tokuhisa

TokyoJP1 patent

2 Patents

US118676212024
Terahertz Light Detector and Terahertz Measurement Device
NIKON CORPORATION
0 cites
US117572472023
Pulsed Light Generation Device, Pulsed Light Generation Method, Exposure Apparatus Having Pulsed Light Generation Device and Inspection Apparatus Having Pulsed Light Generation Device
NIKON CORPORATION
0 cites