Patents/Inventors

Akira Nagayama

MiyagiJP3 patents

4 Patents

US122887132025
Mounting Table and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121658962024
Substrate Support and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US120338862024
Plasma Processing Apparatus and Method for Manufacturing Mounting Stage
Tokyo Electron Limited
0 cites
US118697552024
Cleaning Method and Protecting Member
TOKYO ELECTRON LIMITED
0 cites