Patents/Inventors

Akira Mikumo

OsakaJP3 patents

4 Patents

US120637212024
Heater
SUMITOMO ELECTRIC INDUSTRIES, Ltd.
0 cites
US120464882024
Semiconductor Manufacturing Apparatus and Wafer Holding Table for Semiconductor Manufacturing Apparatus
SUMITOMO ELECTRIC INDUSTRIES, Ltd.
0 cites
US120338802024
Wafer Holding Body
SUMITOMO ELECTRIC INDUSTRIES, Ltd.
0 cites
US117323592023
Wafer Holder
Sumitomo Electric Industries, Ltd.
0 cites