Patents/Inventors

Akira Koshiishi

Hwaseong-siKR1 patent

2 Patents

US117987882023
Hollow Cathode, an Apparatus Including a Hollow Cathode for Manufacturing a Semiconductor Device, and a Method of Manufacturing a Semiconductor Device Using a Hollow Cathode
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117911402023
Confinement Ring for Use in a Plasma Processing System
Lam Research Corporation
0 cites