Patents/Inventors

Akira Kagoshima

TokyoJP5 patents

4 Patents

US125300232026
Apparatus Diagnostic System, Apparatus Diagnostic Apparatus, Semiconductor Device Manufacturing System, and Apparatus Diagnostic Method
Hitachi High-tech Corporation
0 cites
US124427702025
Plasma Processing Apparatus, Plasma Processing Method and Plasma Processing Analysis Method
HITACHI HIGH-TECH CORPORATION
0 cites
US120149092024
Plasma Processing Apparatus and Plasma Processing System
HITACHI HIGH-TECH CORPORATION
0 cites
US116437272023
Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites