Patents/Inventors

Akira Kageyama

TokyoJP5 patents

3 Patents

US125468052026
Sample Inspection Apparatus
Hitachi High-tech Corporation
0 cites
US119770992024
Method for Manufacturing Semiconductor Device
Hitachi High-tech Corporation
0 cites
US117091992023
Evaluation Apparatus for Semiconductor Device
Hitachi High-tech Corporation
0 cites