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Inventors
Akira Fujio
Yamanashi
JP
1 patent
2 Patents
US12163898
2024
Method and Apparatus for Detecting Abnormal Growth of Graphene
TOKYO ELECTRON LIMITED
0 cites
US12037246
2024
Method for Detecting Abnormal Growth of Graphene, Measurement Apparatus, and Film Formation System
Tokyo Electron Limited
0 cites