9 Patents
- US125043322025Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites - US123984602025Substrate Processing Apparatus, Furnace Opening Assembly, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Tangible Medium
Kokusai Electric Corporation
0 cites - US123680432025Substrate Processing Apparatus, Processing Method, and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites - US122690522025Substrate Liquid Processing Apparatus and Liquid Discharge Evaluation Method
TOKYO ELECTRON LIMITED
0 cites - 0 cites
- US120149432024Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites - US119063672024Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites - US118802132024Substrate Liquid Processing Apparatus and Substrate Liquid Processing Method
Tokyo Electron Limited
0 cites - US118697642024Substrate Processing Apparatus, Substrate Processing Method and Non-transitory Computer-readable Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites