Patents/Inventors

Akiko Kiyotomi

KoshiJP7 patents

7 Patents

US125387432026
Warpage Amount Estimation Apparatus and Warpage Amount Estimation Method
Tokyo Electron Limited
0 cites
US123140232025
Treatment Condition Setting Method, Storage Medium, and Substrate Treatment System
Tokyo Electron Limited
0 cites
US118239222023
Substrate Inspection Apparatus, Substrate Processing Apparatus, Substrate Inspection Method, and Computer-readable Recording Medium
TOKYO ELECTRON LIMITED
0 cites
US117264382023
Treatment Condition Setting Method, Storage Medium, and Substrate Treatment System
Tokyo Electron Limited
0 cites
US116768442023
Coating Film Forming Apparatus and Adjustment Method Therefor
TOKYO ELECTRON LIMITED
0 cites
US116699552023
Substrate Defect Inspection Method, Storage Medium, and Substrate Defect Inspection Apparatus
Tokyo Electron Limited
0 cites
US116095022023
Substrate Inspection Apparatus, Substrate Processing Apparatus, Substrate Inspection Method, and Computer-readable Recording Medium
TOKYO ELECTRON LIMITED
0 cites