Patents/Inventors

Akiko Kai

KoshiJP4 patents

5 Patents

US122610642025
Tank, Substrate Processing Apparatus, and Method of Using the Tank
TOKYO ELECTRON LIMITED
0 cites
US119602092024
Developing Treatment Method and Developing Treatment Apparatus
Tokyo Electron Limited
0 cites
US118481892023
Substrate Processing Method, Recording Medium and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118239182023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117200262023
Developing Treatment Method, Computer Storage Medium and Developing Treatment Apparatus
Tokyo Electron Limited
0 cites