3 Patents
- 0 cites
- US116239352023Raw Material for Forming Thin Film by Atomic Layer Deposition Method, Method of Producing Thin Film, and Alkoxide Compound
ADEKA CORPORATION
0 cites - US116187622023Compound, Raw Material for Forming Thin Film, Method for Manufacturing Thin Film, and Amidine Compound
ADEKA CORPORATION
0 cites