Patents/Inventors

Akihiro Kuribayashi

NaganoJP3 patents

3 Patents

US124328192025
Substrate Fixing Device
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US120778552024
Cleaning Method and Film Deposition Apparatus
Tokyo Electron Limited
0 cites
US118697932024
Electrostatic Chuck and Substrate Fixing Device
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites