Akihiro Hirate

2 Patents

• US118977732024

  Carbide-coated Carbon Material

  SHIN-ETSU CHEMICAL CO., Ltd.

  0 cites
• US115552552023

  Tantalum Carbide Coated Carbon Material, Manufacturing Method Thereof, and Member for Apparatus for Manufacturing Semiconductor Single Crystal

  SHIN-ETSU CHEMICAL CO., Ltd.

  0 cites