Patents/Inventors

Akhil Singhal

Beaverton, ORUS18 patents

12 Patents

US126222322026
Advanced Self Aligned Multiple Patterning Using Tin Oxide
Lam Research Corporation
0 cites
US125326752026
Core Removal
Lam Research Corporation
0 cites
US123811062025
Systems and Methods of Seasoning Electrostatic Chucks with Dielectric Seasoning Films
Applied Materials, Inc.
0 cites
US123728722025
Extreme Ultraviolet (EUV) Lithography Using an Intervening Layer or a Multi-layer Stack with Varying Mean Free Paths for Secondary Electron Generation
LAM RESEARCH CORPORATION
0 cites
US123717812025
In Situ Protective Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites
US123157242025
Helium-free Silicon Formation
Applied Materials, Inc.
0 cites
US122119082025
Profile Shaping for Control Gate Recesses
Applied Materials, Inc.
0 cites
US119159232024
Method to Clean Sno 2 Film from Chamber
Lam Research Corporation
0 cites
US118878462024
Deposition Tool and Method for Depositing Metal Oxide Films on Organic Materials
Lam Research Corporation
0 cites
US117842292023
Profile Shaping for Control Gate Recesses
Applied Materials, Inc.
0 cites
US116705162023
Metal-containing Passivation for High Aspect Ratio Etch
Lam Research Corporation
0 cites
US116462162023
Systems and Methods of Seasoning Electrostatic Chucks with Dielectric Seasoning Films
Applied Materials, Inc.
0 cites