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Inventors
Ahmet Burak Cunbul
Eindhoven
NL
7 patents
2 Patents
US12619170
2026
Projection Unit for a Level Sensor, Method of Monitoring Height of a Substrate, and Lithographic System Comprising the Projection Unit
ASML NETHERLANDS B.V.
0 cites
US12585049
2026
Achromatic Optical Relay Arrangement
ASML NETHERLANDS B.V.
0 cites