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Inventors
Agung Setiadi
Kokubunji
JP
1 patent
2 Patents
US12494361
2025
Method for Selective Deposition of Silicon Nitride and Structure Including Selectively-deposited Silicon Nitride Layer
ASM IP Holding B.V.
0 cites
US12419198
2025
Magnetic Memory
Kioxia Corporation
0 cites