9 Patents
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- US121365442024Etch Uniformity Improvement for Single Turn Internal Coil PVD Chamber
APPLIED MATERIALS, Inc.
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- US120946992024Methods and Apparatus for Controlling Ion Fraction in Physical Vapor Deposition Processes
APPLIED MATERIALS, Inc.
0 cites - US119329342024Method for Particle Removal from Wafers Through Plasma Modification in Pulsed PVD
Applied Materials, Inc.
0 cites - 0 cites
- US118107702023Methods and Apparatus for Controlling Ion Fraction in Physical Vapor Deposition Processes
APPLIED MATERIALS, Inc.
0 cites - 0 cites
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