Patents/Inventors

Aaron Lynn Routzahn

Fremont, CAUS4 patents

3 Patents

US126159802026
Etching of Indium Gallium Zinc Oxide
Lam Research Corporation
0 cites
US125989292026
Atomic Layer Etching of Molybdenum
Lam Research Corporation
0 cites
US120805922024
Film Stack Simplification for High Aspect Ratio Patterning and Vertical Scaling
Lam Research Corporation
0 cites