Patents/Inventors

Aaron Durbin

Portland, ORUS3 patents

3 Patents

US125776662026
Precursor Dispensing Systems with Line Charge Volume Containers for Atomic Layer Deposition
Lam Research Corporation
0 cites
US123226172025
Dual Zone Heaters for Metallic Pedestals
LAM RESEARCH CORPORATION
0 cites
US119087152024
Dynamic Temperature Control of Substrate Support in Substrate Processing System
LAM RESEARCH CORPORATION
0 cites