Patents/Inventors

Aaron Bingham

Newberg, ORUS3 patents

3 Patents

US125867572026
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites
US122093122025
Temperature Control of a Multi-zone Pedestal
LAM RESEARCH CORPORATION
0 cites
US115943972023
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites