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Aarne Oja
Espoo
FI
6 patents
6 Patents
US12574002
2026
MEMS Resonator
KYOCERA Technologies Oy
0 cites
US12328110
2025
Microelectromechanical System Resonator Assembly
KYOCERA TECHNOLOGIES OY
0 cites
US12323131
2025
Spring-mass Microelectromechanical Resonator
KYOCERA TECHNOLOGIES OY
0 cites
US12212300
2025
MEMS Resonator with High Quality Factor and Its Use
KYOCERA TECHNOLOGIES OY
0 cites
US12132467
2024
MEMS Resonator Array Arrangement
KYOCERA Technologies Oy
0 cites
US11697586
2023
Surface Micromechanical Element and Method for Manufacturing the Same
Teknologian Tutkimuskeskus VTT Oy
0 cites