- US12205325utility2025Vision-based Wafer Pre-alignment Platform and Alignment Method0 cites
- US12123459utility2024Combinable Multi-axis Structure and Linear Motion Platform Having the Structure0 cites
- US12123699utility2024System and Method for Detecting Thickness and Bow of Large-sized Wafers0 cites
- US12098749utility2024Large-stroke Air Flotation Type Nano-positioning Platform0 cites
- US12092157utility2024Magnetic Preloading Air Bearing and Linear Platform Having Same0 cites
- US12090590utility2024Six-degree-of-freedom Air-floating Moving Apparatus0 cites