Patents/Assignees

Varian Semiconductor Equipment Associates, Inc.

6 patents in portfolio

US12104253utility2024
Techniques for Controlling Precursors in Chemical Deposition Processes
0 cites
US11718914utility2023
Techniques for Controlling Precursors in Chemical Deposition Processes
0 cites
US11691184utility2023
System and Tool for Cleaning a Glass Surface of an Accelerator Column
0 cites
US11631588utility2023
Method and Apparatus for Non Line-of-sight Doping
0 cites
US11574800utility2023
Extreme Edge Uniformity Control
0 cites
US8344318utility2013
Technique for Monitoring and Controlling a Plasma Process with an Ion Mobility Spectrometer
0 cites