Patents/Assignees

UP CHEMICAL CO., Ltd.

5 patents in portfolio

US12428435utility2025
Aluminum Precursor Compound, Production Method Therefor, and Aluminum Containing Layer Forming Method Using Same
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US12410201utility2025
Silicon Precursor Compound, Silicon-containing Film Formation Composition Comprising Same, and Method for Forming Film by Using Silicon-containing Film Formation Composition
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US12319705utility2025
Ruthenium Precursor Composition, Preparation Method Therefor, and Formation Method for Ruthenium-containing Film Using Same
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US11912728utility2024
Aluminum Compounds and Methods of Forming Aluminum- Containing Film Using the Same
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US11905305utility2024
Silicon Precursor Compound, Preparation Method Therefor, and Silicon-containing Film Formation Method Using Same
0 cites