Patents/Assignees

ULVAC, Inc.

31 patents in portfolio

US11869791utility2024
Vacuum Processing Apparatus
0 cites
US11842887utility2023
Film Formation Apparatus
0 cites
US11732965utility2023
Freeze-drying Device and Freeze-drying Method
0 cites
US11674217utility2023
Method of Manufacturing Substrate with a Transparent Conductive Film, Manufacturing Apparatus of Substrate with Transparent Conductive Film, Substrate with Transparent Conductive Film, and Solar Cell
0 cites
US11665809utility2023
High-frequency Power Circuit, Plasma Treatment Apparatus, and Plasma Treatment Method
0 cites
US11646199utility2023
Sub-stoichiometric Metal-oxide Thin Films
0 cites
US11628565utility2023
Substrate Transport Device and Substrate Transporting Method
0 cites
US11629400utility2023
Sputtering Target and Method of Producing the Same
0 cites
US11559889utility2023
Substrate Transport Device and Substrate Transporting Method
0 cites
US11549173utility2023
Sputtering Apparatus
0 cites
US8341854utility2013
Vacuum Freeze-drying Apparatus and Method for Vacuum Freeze Drying
0 cites

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