Patents/Assignees

TOKYO ELECTRON LIMITED

1,902 patents in portfolio

US12550668utility2026
Substrate Transfer Device and Power Supply Method for Substrate Transfer Device
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USD1110976design2026
Retainer for Circuit Substrate Conveyance
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US12543525utility2026
Substrate Processing Apparatus and Substrate Processing Method
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US12543530utility2026
Substrate Transfer Method, Substrate Processing Apparatus, and Recording Medium
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US12543542utility2026
Patterning Method Using Secondary Resist Surface Functionalization for Mask Formation
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US12540390utility2026
Raw Material Supply System
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US12540394utility2026
Selective Film Formation Using Self-assembled Monolayer
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US12541837utility2026
Etching Processing System, Method of Predicting Etching Quality, and Non-transitory Storage Medium of Etching Quality Prediction Storing a Program Causing a Computer to Implement a Prediction
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US12542255utility2026
Plasma Processing Apparatus and Plasma Processing Method
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US12542261utility2026
Substrate Processing Apparatus
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US12543369utility2026
Transistor Stacking by Wafer Bonding
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US12543505utility2026
Method of Manufacturing Magnetoresistive Element, Oxidation Processing Apparatus, and Substrate Processing System
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US12543517utility2026
System and Method for Semiconductor Structure
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US12543522utility2026
Manufacturing Method of Chip-attached Substrate and Substrate Processing Apparatus
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US12541155utility2026
Coaxial See-through Inspection System
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US12538728utility2026
Etching Method and Etching Device
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US12533715utility2026
Substrate Cleaning Apparatus and Substrate Cleaning Method
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US12538560utility2026
Methods for Fabricating Isolation Structures Using Directional Beam Process
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US12534800utility2026
Pre-coating Method and Processing Apparatus
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US12535735utility2026
Modified Thioxanthone Photoinitiators
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