Patents/Assignees

TOKYO ELECTRON LIMITED

1,902 patents in portfolio

US11850743utility2023
Transport Apparatus, Semiconductor Manufacturing Apparatus, and Transport Method
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US11846023utility2023
Injector and Substrate Processing Apparatus Using the Same, and Substrate Processing Method
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US11848189utility2023
Substrate Processing Method, Recording Medium and Substrate Processing Apparatus
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US11848236utility2023
Method for Recessing a Fill Material Within Openings Formed on a Patterned Substrate
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US11842919utility2023
Method of Making 3D Isolation
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US11840759utility2023
Method of Forming Tungsten Film and System Therefor
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US11842886utility2023
Plasma Processing Method and Plasma Processing Apparatus
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US11841617utility2023
Method of Forming a Narrow Trench
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US11842900utility2023
Etching Method and Plasma Processing Apparatus
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US11841278utility2023
Temperature Measurement Sensor, Temperature Measurement System, and Temperature Measurement Method
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US11842904utility2023
Control Device and Substrate Processing Method
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US11842906utility2023
Heating Treatment Apparatus and Heating Treatment Method
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US11843027utility2023
Method of Manufacturing Semiconductor Device
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US11837465utility2023
Deposition Method
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US11837471utility2023
Methods of Patterning Small Features
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US11837480utility2023
Temperature Controlling Apparatus, Temperature Controlling Method, and Placing Table
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US11837487utility2023
Transfer Device, Substrate Processing System, Transfer Method and Substrate Processing Method
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US11837442utility2023
Plasma Processing Apparatus and Substrate Supporter
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US11834745utility2023
Spatial Atomic Layer Deposition
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US11835278utility2023
Temperature Control Medium Processing Apparatus and Temperature Control Medium Processing Method
0 cites

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