- US11961802utility2024Power-tap Pass-through to Connect a Buried Power Rail to Front-side Power Distribution Network0 cites
- US11961758utility2024Apparatus for Processing Substrate and Method of Transferring Substrate0 cites
- US11961755utility2024Substrate Support and Substrate Processing Apparatus0 cites
- US11960209utility2024Developing Treatment Method and Developing Treatment Apparatus0 cites
- US11961746utility2024Substrate Processing Method and Substrate Processing Apparatus0 cites
- US11961718utility2024Plasma Processing Method and Plasma Processing Apparatus0 cites
- US11955352utility2024Substrate Processing Apparatus0 cites
- US11955365utility2024Substrate Processing Method and Substrate Processing Apparatus0 cites
- US11955316utility2024Substrate Processing Method, Method for Manufacturing Semiconducor Device, and Plasma Processing Apparatus0 cites
- US11955337utility2024Substrate Processing Method and Substrate Processing System0 cites
- US11955342utility2024Method of Etching and Apparatus for Plasma Processing0 cites
- US11955356utility2024Processing System and Transfer Method0 cites
- US11952661utility2024Deposition Method0 cites
- US11955314utility2024Plasma Processing Apparatus0 cites
- US11948822utility2024Substrate Transfer Device and Substrate Processing System0 cites
- US11948816utility2024Transfer Apparatus0 cites
- US11948804utility2024Substrate Processing Method and Substrate Processing Apparatus0 cites
- US11948782utility2024Control System, Control Method, Recording Medium Storing Control Program, and Processing System0 cites
- US11942307utility2024Plasma Processing with Radio Frequency (RF) Source and Bias Signal Waveforms0 cites
- US11938500utility2024Substrate Processing Apparatus and Method for Determining Deterioration Degree of Conductive Pipe0 cites