THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
19 patents in portfolio
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- US12228710utility2025Ultra-wide Angle Broadband Polarization Imaging System Based on Metasurface, and Detection Apparatus0 cites
- US12181794utility2024Photolithography Method0 cites
- US12174322utility2024F-P Sensor Probe, Absolute Distance Measurement Device, and Absolute Distance Measurement Method0 cites
- US12100188utility2024Template Mark Detection Method and Template Position Correction Method Based on Single Camera0 cites
- US12092960utility2024Mask Topology Optimization Method and System for Surface Plasmon Near-field Photolithography0 cites
- US12085846utility2024Method for Inverse Optical Proximity Correction of Super-resolution Lithography Based on Level Set Algorithm0 cites
- US12078937utility2024Near-field Lithography Immersion System, Immersion Unit and Interface Module Thereof0 cites
- US11868055utility2024Multifunctional Lithography Device0 cites
- US11754352utility2023Visible Light-transparent and Radiative-cooling Multilayer Film0 cites
- US11724962utility2023Method for Etching Curved Substrate0 cites
- US11714358utility2023Intelligent Correction Device Control System for Super-resolution Lithography Precision Mask0 cites
- US11693320utility2023Secondary Imaging Optical Lithography Method and Apparatus0 cites
- US11675273utility2023Method of Fabricating Micro-nano Structure0 cites