Patents/Assignees

TES CO., Ltd

11 patents in portfolio

US12603251utility2026
Hybrid Chamber
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US12512328utility2025
Method of Processing Substrate
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US12500102utility2025
Substrate Processing Apparatus and Substrate Monitoring Method
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US12488993utility2025
Substrate Processing Method
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US12488982utility2025
Method of Processing Substrate
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US12480211utility2025
Oxygen-doped Amorphous Carbon Film and Method for Depositing the Same
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US12444578utility2025
Method for Protecting Apparatus from Etching Substances and Method for Forming Oxide Film
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US12438020utility2025
Substrate Processing Apparatus
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US12308214utility2025
Method of Processing Substrate
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US12308243utility2025
Method of Processing Substrate Having Silicon Nitride Layer
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US12233501utility2025
Substrate Support Device
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