Patents/Assignees

T-robotics Co., Ltd.

9 patents in portfolio

US12444641utility2025
Travel Robot for Moving Substrate Transfer Robot in Vacuum Chamber
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US12434921utility2025
Travel Robot for Moving Substrate Transfer Robot in Vacuum Chamber
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US12278132utility2025
Substrate Transfer Robot for Transferring Substrate in Vacuum Chamber
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US12255090utility2025
Apparatus for Transferring Substrate in Vacuum Chamber
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US12234106utility2025
Apparatus for Transferring Substrate in Vaccum Chamber
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US12131939utility2024
Substrate Transfer Robot for Transferring Substrate in Vacuum Chamber
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US12080586utility2024
Substrate Transfer Robot for Transferring Substrate in Vacuum Chamber
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US11850744utility2023
Travel Robot for Moving Substrate Transfer Robot in Chamber
0 cites
US11820005utility2023
Substrate Transfer Robot for Transferring Substrate in Vacuum Chamber
0 cites