Patents/Assignees

SUSS MICROTEC LITHOGRAPHY GmbH

5 patents in portfolio

US12172344utility2024
Stamp Replication Device and Method for Producing a Holding Means for a Stamp Replication Device as Well as a Stamp
0 cites
US12009230utility2024
Bonding Device as Well as Method for Bonding Substrates
0 cites
US11776827utility2023
Adapter, Connection Device and Supply System
0 cites
US11651983utility2023
Apparatus, System, and Method for Handling Aligned Wafer Pairs
0 cites
US8343300utility2013
Automated Thermal Slide Debonder
0 cites