Patents/Assignees

SUMCO CORPORATION

102 patents in portfolio

US12004344utility2024
Method of Reducing Wrap Imparted to Silicon Wafer by Semiconductor Layers
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US11990336utility2024
Silicon Epitaxial Wafer Production Method and Silicon Epitaxial Wafer
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US11984346utility2024
Susceptor, Epitaxial Growth Apparatus, Method of Producing Epitaxial Silicon Wafer, and Epitaxial Silicon Wafer
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US11969856utility2024
Wafer Manufacturing Method and Wafer
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US11955390utility2024
Semiconductor Wafer Evaluation Method and Semiconductor Wafer Manufacturing Method
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US11948789utility2024
Wafer Production Method
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US11948819utility2024
Method of Evaluating Silicon Wafer, Method of Evaluating Silicon Wafer Manufacturing Process, Method of Manufacturing Silicon Wafer, and Silicon Wafer
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US11939695utility2024
Quartz Glass Crucible, Manufacturing Method of Silicon Single Crystal Using the Same, and Infrared Transmissivity Measurement Method and Manufacturing Method of Quartz Glass Crucible
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US11935745utility2024
Semiconductor Epitaxial Wafer and Method of Producing Semiconductor Epitaxial Wafer, and Method of Producing Solid-state Imaging Device
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US11920257utility2024
Method of Evaluating Cleanliness, Method of Determining Cleaning Condition, and Method of Manufacturing Silicon Wafer
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US11898246utility2024
Vapor Deposition Device
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US11890719utility2024
Method of Polishing Silicon Wafer
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US11885038utility2024
Method of Estimating Convection Pattern of Silicon Melt, Method of Estimating Oxygen Concentration of Silicon Single Crystal, Method of Manufacturing Silicon Single Crystal, and Raising Device of Silicon Single Crystal
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US11888036utility2024
Method for Setting a Nitrogen Concentration of a Silicon Epitaxial Film in Manufacturing an Epitaxial Silicon Wafer
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US11873577utility2024
Epitaxial Wafer Production System for Performing a Correction Based on Variation in Total Output Value of Upper and Lower Lamps
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US11846039utility2023
Vapor Deposition Device and Method for Manufacturing Epitaxial Silicon Wafer
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US11826870utility2023
Apparatus and Method for Double-side Polishing Work
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US11814745utility2023
Method for Producing Silicon Single Crystal
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US11781242utility2023
Method for Controlling Convection Pattern of Silicon Melt, Method for Producing Silicon Single Crystals, and Device for Pulling Silicon Single Crystals
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US11772231utility2023
Double-sided Wafer Polishing Method
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