Patents/Assignees

SPTS Technologies Limited

25 patents in portfolio

US12590760utility2026
Spin Rinse Dryer with Improved Drying Characteristics
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US12565698utility2026
Method of Operating a PVD Apparatus
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US12555743utility2026
Plasma Producing Apparatus
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US12500081utility2025
Method of Deposition
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US12494372utility2025
Plasma Etched Silicon Carbide
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US12492465utility2025
PVD Apparatus and Method
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US12488969utility2025
Deposition Apparatus
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US12417910utility2025
Method of Reducing Surface Roughness
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US12412747utility2025
Post-processing of Indium-containing Compound Semiconductors
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US12362152utility2025
Plasma Etching Apparatus and Method
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US12334353utility2025
Method and Apparatus for Plasma Etching
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US12308240utility2025
Method and Apparatus
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US12207556utility2025
Method of Deposition
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US12100619utility2024
Semiconductor Wafer Dicing Process
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US12077863utility2024
PE-CVD Apparatus and Method
0 cites
US12043891utility2024
Deposition Method of a Metallic Layer on a Substrate of a Resonator Device
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US11961722utility2024
Method and Apparatus for Controlling Stress Variation in a Material Layer Formed via Pulsed DC Physical Vapor Deposition
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US11913109utility2024
Apparatus and a Method of Controlling Thickness Variation in a Material Layer Formed Using Physical Vapour Deposition
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US11894254utility2024
Support
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US11802341utility2023
PE-CVD Apparatus and Method
0 cites

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