Patents/Assignees

SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., Ltd.

5 patents in portfolio

US12163814utility2024
Displacement Measuring Apparatus, Displacement Measuring Method and Photolithography Device
0 cites
US11899181utility2024
Lithography Projection Objective
0 cites
US11664228utility2023
Vacuumizing Device and Vacuumizing Method for Bonding Substrate
0 cites
US11549891utility2023
Automatic Optical Inspection Device and Method
0 cites
US11551948utility2023
Semiconductor Manufacturing Apparatus
0 cites