- US12276684utility2025Method and Apparatus for Determining Cable Length for Plasma Processing Equipment0 cites
- US12276025utility2025Substrate Processing Apparatus and Substrate Processing Method0 cites
- US12272544utility2025Apparatus for Treating Substrate and Method for Treating Substrate0 cites
- US12269057utility2025Apparatus and Method for Processing Substrate0 cites
- US12269273utility2025Substrate Treating Liquid Supply Unit and Substrate Treating Apparatus Including the Same0 cites
- US12272543utility2025Apparatus for Treating Substrate and Method for Treating Substrate0 cites
- US12272569utility2025Apparatus for Treating Substrate and Temperature Control Method0 cites
- US12266561utility2025Apparatus for Treating Substrate and Method of Coupling Support Unit0 cites
- US12266512utility2025Plasma Processing Apparatus0 cites
- US12266546utility2025Unit for Supplying Liquid, Apparatus and Method for Treating Substrate with the Unit0 cites
- US12261072utility2025Substrate Test Apparatus and Method for Measuring Dechucking Force Using the Same0 cites
- US12255050utility2025Antenna Member and Apparatus for Treating Substrate0 cites
- US12252339utility2025Article Transport Vehicle and Article Transport Facility0 cites
- US12251944utility2025Meniscus Measuring Apparatus and Method, Substrate Processing Apparatus0 cites
- US12249491utility2025Substrate Treating Apparatus and Substrate Support Unit0 cites
- US12240701utility2025Apparatus for Transporting Container and System for Storing Container with the Apparatus0 cites
- US12243847utility2025Bonding Apparatus and Bonding Method0 cites
- US12243726utility2025Substrate Supporting Unit, Apparatus for Treating Substrate Including the Same, and Ring Transfer Method0 cites
- US12242500utility2025Data Processing Method and Data Comparing Method0 cites