Patents/Assignees

Plasma-therm LLC

5 patents in portfolio

US12489018utility2025
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
0 cites
US11908741utility2024
Protective Coating for Plasma Dicing
0 cites
US11747494utility2023
Ion Filter Using Aperture Plate with Plurality of Zones
0 cites
US11651999utility2023
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
0 cites
US11587834utility2023
Protective Coating for Plasma Dicing
0 cites