Patents/Assignees

NISSIN ION EQUIPMENT CO., Ltd.

10 patents in portfolio

US12340974utility2025
Hydrogen Supply Device, and Ion Beam Irradiation Apparatus Equipped Therewith
0 cites
US12328807utility2025
Vaporizer, Ion Source and Method for Generating Aluminum-containing Vapor
0 cites
US12272588utility2025
Wafer Clamping Method and Semiconductor Manufacturing Apparatus
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US12249479utility2025
Substrate Holding Device
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US12112915utility2024
Vaporizer, Ion Source and Method for Generating Aluminum-containing Vapor
0 cites
US11955311utility2024
Ion Beam Irradiation Apparatus and Program Therefor
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US11929266utility2024
Wafer Supporting Device
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US11776839utility2023
Substrate Holding Device
0 cites
US11749501utility2023
Ion Implantation Apparatus
0 cites
US11621180utility2023
Heating Device
0 cites