Patents/Assignees

Nano-master, Inc.

3 patents in portfolio

US12195850utility2025
Apparatus and Methods for Roll-to-roll (R2R) Plasma Enhanced/activated Atomic Layer Deposition (PEALD/PAALD)
0 cites
US12197125utility2025
Mask and Reticle Protection with Atomic Layer Deposition (ALD)
0 cites
US11640900utility2023
Electron Cyclotron Rotation (ecr)-enhanced Hollow Cathode Plasma Source (HCPS)
0 cites