Patents/Assignees

MICO CERAMICS Ltd.

26 patents in portfolio

US11955320utility2024
Ceramic Susceptor
0 cites
US11937345utility2024
Ceramic Heater
0 cites
US11908667utility2024
Ceramic Susceptor
0 cites
US11908725utility2024
Electrostatic Chuck Heater and Manufacturing Method Therefor
0 cites
US11735459utility2023
Electrostatic Chuck
0 cites
US11581211utility2023
Electrostatic Chuck Having a Cooling Structure
0 cites

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