- US12567559utility2026Ion Implantation Device with Energy Filter Having Additional Thermal Energy Dissipation Surface Area0 cites
- US12494337utility2025Ion Implantation Device Comprising Energy Filter and Additional Heating Element0 cites
- US12368047utility2025Method for Producing Semiconductor Components, and Semiconductor Component0 cites
- US12266499utility2025Energy Filter for Use in the Implantation of Ions Into a Substrate0 cites
- US12125670utility2024Device and Method for Implanting Particles Into a Substrate0 cites
- US12080510utility2024Energy Filter Element for Ion Implantation Systems for the Use in the Production of Wafers0 cites
- US11929229utility2024Semiconductor Wafer0 cites
- US11837430utility2023Energy Filter Element for Ion Implantation Systems for the Use in the Production of Wafers0 cites
- US11705300utility2023Method and Device for Implanting Ions in Wafers0 cites