Patents/Assignees

LOT VACUUM CO., Ltd.

4 patents in portfolio

US12327713utility2025
Plasma Reactor for Inductively Coupled Plasma and Method of Assembling the Same
0 cites
US12121857utility2024
Piping Apparatus Having Harmful Gas Treatment Device, Design Method Therefor, and Harmful Gas Treatment Facility Comprising Same
0 cites
US12082331utility2024
Inductively Coupled Plasma Reactor and Wire Structure for Antenna Coil of Inductively Coupled Plasma Reactor
0 cites
US12062528utility2024
Plasma Reactor for Inductively Coupled Plasma and Method of Assembling the Same
0 cites