Patents/Assignees

Lam Research Corporation

562 patents in portfolio

US8343305utility2013
Method and Apparatus for Diagnosing Status of Parts in Real Time in Plasma Processing Equipment
0 cites
US8342122utility2013
Methods and Apparatus for Changing Area Ratio in a Plasma Processing System
0 cites

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Lam Research Corporation Patents — 562 US Patents | Patents.us