Patents/Assignees

Lam Research Corporation

562 patents in portfolio

US12241173utility2025
Wafer Shielding for Prevention of Lipseal Plate-out
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US12237221utility2025
Nucleation-free Tungsten Deposition
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US12237203utility2025
System, Method, and User Interface for Edge Ring Wear Compensation
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US12237201utility2025
Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns
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US12237155utility2025
Magnetic Shielding for Plasma Sources
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US12237154utility2025
Bottom and Middle Edge Rings
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US12230495utility2025
Method of Depositing Silicon Nitride Films
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US12230482utility2025
Moveable Edge Ring Designs
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US12227842utility2025
Vapor Accumulator for Corrosive Gases with Purging
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US12227840utility2025
Substrate Support with Varying Depths of Areas Between Mesas and Corresponding Temperature Dependent Method of Fabricating
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US12227837utility2025
Ex Situ Coating of Chamber Components for Semiconductor Processing
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US12224161utility2025
Low Temperature Manifold Assembly for Substrate Processing Systems
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US12217972utility2025
Multi-state Pulsing for Achieving a Balance Between Bow Control and Mask Selectivity
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US12217940utility2025
Sensor Data Compression in a Plasma Tool
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US12217985utility2025
Wafer Placement Correction in Indexed Multi-station Processing Chambers
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US12215421utility2025
Systems and Methods for Pulse Width Modulated Dose Control
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US12217955utility2025
Method for Etching Features Using a Targeted Deposition for Selective Passivation
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US12217945utility2025
Sorption Chamber Walls for Semiconductor Equipment
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US12217944utility2025
High Power Cable for Heated Components in RF Environment
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US12217939utility2025
RF Tuning Systems Including Tuning Circuits Having Impedances for Setting and Adjusting Parameters of Electrodes in Electrostatic Chucks
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