Patents/Assignees

Lam Research Corporation

562 patents in portfolio

US12300489utility2025
UV Cure for Local Stress Modulation
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US12293943utility2025
Gold Through Silicon Mask Plating
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USD1073758design2025
Baffle for Substrate Processing System
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US12293919utility2025
Alternating Etch and Passivation Process
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US12291777utility2025
Throughput Improvement with Interval Conditioning Purging
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US12288685utility2025
Modifying Hydrophobicity of a Wafer Surface Using an Organosilicon Precursor
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US12288702utility2025
Semiconductor Wafer Mass Metrology Apparatus and Semiconductor Wafer Mass Metrology Method
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US12283463utility2025
Systems and Methods for Multi-level Pulsing in RF Plasma Tools
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US12283462utility2025
Control of Plasma Formation by RF Coupling Structures
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US12283461utility2025
Systems and Methods for Achieving Peak Ion Energy Enhancement with a Low Angular Spread
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US12283451utility2025
Systems and Methods for Filtering Radio Frequencies from a Signal of a Thermocouple and Controlling a Temperature of an Electrode in a Plasma Chamber
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US12281402utility2025
Low Angle Membrane Frame for an Electroplating Cell
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US12280091utility2025
Etch Selectivity Control in Atomic Layer Etching
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US12278112utility2025
Multiple State Pulsing for High Aspect Ratio Etch
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US12278125utility2025
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
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US12270103utility2025
Plasma-enhanced Atomic Layer Deposition with Radio-frequency Power Ramping
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US12270748utility2025
Method and Apparatus for Measuring Particles
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US12274047utility2025
Line Bending Control for Memory Applications
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US12272608utility2025
Station-to-station Control of Backside Bow Compensation Deposition
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US12272591utility2025
Friction Stir Welding in Semiconductor Manufacturing Applications
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