Patents/Assignees

LAM RESEARCH AG

9 patents in portfolio

US12538752utility2026
Apparatus for Processing a Wafer-shaped Article
0 cites
US12512343utility2025
Apparatus for Dispensing a Liquid
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US12456644utility2025
Apparatus for Processing a Wafer, and Method of Controlling Such an Apparatus
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US12217980utility2025
Apparatus for Processing a Wafer, and Method of Controlling Such an Apparatus
0 cites
US12198945utility2025
Vapor Delivery Head for Preventing Stiction of High Aspect Ratio Structures And/or Repairing High Aspect Ratio Structures
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US11975992utility2024
Method of Producing Rinsing Liquid
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US11854792utility2023
Systems and Methods for Preventing Stiction of High Aspect Ratio Structures And/or Repairing High Aspect Ratio Structures
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US11823892utility2023
Gas Mixture Including Hydrogen Fluoride, Alcohol and an Additive for Preventing Stiction of And/or Repairing High Aspect Ratio Structures
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US11810796utility2023
Wafer Cleaning Method and Apparatus Therefore
0 cites