- US12265212utility20253D Microscope Including Insertable Components to Provide Multiple Imaging and Measurement Capabilities0 cites
- US12094101utility2024Inspection of Reticles Using Machine Learning0 cites
- US12013634utility2024Reduction or Elimination of Pattern Placement Error in Metrology Measurements0 cites
- US11971664utility2024Reducing Device Overlay Errors0 cites
- US11955391utility2024Process Monitoring of Deep Structures with X-ray Scatterometry0 cites
- US11815347utility2023Optical Near-field Metrology0 cites
- US11784097utility2023Measurement of Overlay Error Using Device Inspection System0 cites
- US11709433utility2023Device-like Metrology Targets0 cites
- US11694327utility2023Cross Layer Common-unique Analysis for Nuisance Filtering0 cites
- US11555689utility2023Measuring Thin Films on Grating and Bandgap on Grating0 cites
- US11551980utility2023Dynamic Amelioration of Misregistration Measurement0 cites
- US8345243utility2013Overlay Metrology Target0 cites