- US11668601utility2023Instrumented Substrate Apparatus0 cites
- US11662716utility2023Secure Remote Collaboration for Equipment in a Manufacturing Facility0 cites
- US11662646utility2023Inspection and Metrology Using Broadband Infrared Radiation0 cites
- US11662562utility2023Broadband Illumination Tuning0 cites
- US11656274utility2023Systems and Methods for Evaluating the Reliability of Semiconductor Die Packages0 cites
- US11651934utility2023Systems and Methods of Creating Multiple Electron Beams0 cites
- US11644419utility2023Measurement of Properties of Patterned Photoresist0 cites
- US11640117utility2023Selection of Regions of Interest for Measurement of Misregistration and Amelioration Thereof0 cites
- US11638938utility2023In Situ Process Chamber Chuck Cleaning by Cleaning Substrate0 cites
- US11637030utility2023Multi-stage, Multi-zone Substrate Positioning Systems0 cites
- US11636996utility2023Magnetic Immersion Electron Gun0 cites
- US11635682utility2023Systems and Methods for Feedforward Process Control in the Manufacture of Semiconductor Devices0 cites
- US11629952utility2023Detection Aided Two-stage Phase Unwrapping on Pattern Wafer Geometry Measurement0 cites
- US11624775utility2023Systems and Methods for Semiconductor Defect-guided Burn-in and System Level Tests0 cites
- US11624904utility2023Vapor as a Protectant and Lifetime Extender in Optical Systems0 cites
- US11615993utility2023Clustering Sub-care Areas Based on Noise Characteristics0 cites
- US11615939utility2023Shaped Aperture Set for Multi-beam Array Configurations0 cites
- US11614692utility2023Self-moire Grating Design for Use in Metrology0 cites
- US11617256utility2023Laser and Drum Control for Continuous Generation of Broadband Light0 cites